Title :
Silicone films for insulating layer in multilayer interconnection
fDate :
2/1/1969 12:00:00 AM
Keywords :
Computer graphics; Conductivity; Dielectric breakdown; Dielectric constant; Dielectric losses; Electrons; Insulation; Integrated circuit interconnections; Nonhomogeneous media; Semiconductor films;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1969.16673
