DocumentCode :
1035711
Title :
A thin-film diode strain sensor
Author :
Moore, R. Max
Volume :
16
Issue :
2
fYear :
1969
fDate :
2/1/1969 12:00:00 AM
Firstpage :
253
Lastpage :
253
Keywords :
Capacitive sensors; Frequency modulation; Mechanical sensors; Semiconductor device noise; Semiconductor diodes; Semiconductor thin films; Sensor phenomena and characterization; Substrates; Switches; Thin film sensors;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1969.16704
Filename :
1475746
Link To Document :
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