Scanning electron mirror microscopy and scanning electron microscopy of integrated circuits

The recently developed scanning electron mirror microscope (SEMM) is compared with other types of electron microscopes, such as the electron mirror microscope (EMM) and the scanning electron microscope (SEM), for examining integrated circuits. Potential advantages of the SEMM include high resolution, elimination of electron bombardment damage, and high sensitivity of voltage gradients, magnetic fields, and topography. Preliminary observations of integrated, circuits obtained with the feasibility SEMM at various specimen potentials are discussed.