Title :
Miniature micromachined Fabry-Perot interferometers in silicon
Author :
Mallinson, S.R. ; Jerman, J.H.
Author_Institution :
British Telecom Research Laboratories, Ipswich, UK
Abstract :
A new technique for the manufacture of miniature Fabry-Perot interferometers in silicon for use in the near-infra-red region is described. Tuning and parallelism control were achieved electrostatically, yielding low drive voltages and finesses exceeding 90 at 1.4 ¿m. Such devices will prove useful for laser intracavity elements and wavelength demultiplexers in fibre telecommunication systems.
Keywords :
elemental semiconductors; light interferometers; optical communication equipment; optical filters; silicon; 1.4 micron; Si; fibre telecommunication systems; fitnesses; laser intracavity elements; low drive voltages; micromachined Fabry-Perot interferometers; near-infra-red region; parallelism control; tuning; wavelength demultiplexers;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19870728
