Lifetime Measurements on a High-Reliability RF-MEMS Contact Switch

Radio frequency microelectromechanical systems (RF MEMS) cantilever contact switches have been tested for lifetime. The mean cycles-to-failure measured on an ensemble of switches was 430 billion switch cycles. The longest lifetime exhibited without degradation of the switch was 914 billion switch cycles. The devices were switched at 20 kHz with an incident RF frequency of 10 GHz and an incident RF power of 20 dBm. Testing was performed continuously over a period of approximately 18 months. The switches were operated in a cold-switched mode.