Title :
Semiconductor mechanical sensors
Author :
Wortman, J.J. ; Monteith, Larry K.
Author_Institution :
Research Triangle Institute, Research Triangle Park, N.C.
fDate :
10/1/1969 12:00:00 AM
Abstract :
The purpose of this paper is to briefly review the concepts proposed to explain the piezojunction effect and to describe the techniques employed in its application. Several experimental transducers which have been constructed and evaluated are described.
Keywords :
Charge carrier density; Charge carrier processes; Electron mobility; Electron traps; Force sensors; Mechanical sensors; P-n junctions; Solid state circuits; Stress; Voltage;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1969.16869
