DocumentCode
1037204
Title
Semiconductor mechanical sensors
Author
Wortman, J.J. ; Monteith, Larry K.
Author_Institution
Research Triangle Institute, Research Triangle Park, N.C.
Volume
16
Issue
10
fYear
1969
fDate
10/1/1969 12:00:00 AM
Firstpage
855
Lastpage
860
Abstract
The purpose of this paper is to briefly review the concepts proposed to explain the piezojunction effect and to describe the techniques employed in its application. Several experimental transducers which have been constructed and evaluated are described.
Keywords
Charge carrier density; Charge carrier processes; Electron mobility; Electron traps; Force sensors; Mechanical sensors; P-n junctions; Solid state circuits; Stress; Voltage;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1969.16869
Filename
1475911
Link To Document