Title :
Self-compensating silicon load cell with an electronic converter
Author :
Fischler, Alfred S. ; Collins, John A.
Author_Institution :
IBM Corporation, San Jose, Calif.
fDate :
10/1/1969 12:00:00 AM
Abstract :
A diffused strain-gauge transducer has been developed for application in either a load cell or differential pressure configuration. The diffused strain elements eliminate the need for bonding material and insure transmission of the applied load to the sensing elements, One unique feature of the transducer is its ability to provide an electrical signal which is proportional to temperature as well as pressure. Other advantages include large output signals, high impedance, small hysteresis, and small temperature dependence. Also described is an electronic converter which provides a nominal 4-20 mA output signal over the operating temperature range.
Keywords :
Bonding; Capacitive sensors; Doping; Hysteresis; Resistors; Silicon; Temperature dependence; Temperature distribution; Temperature sensors; Transducers;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1969.16870