Title :
A silicon integrated circuit force sensor
Author :
Fulkerson, David E.
Author_Institution :
Honeywell, Inc., Hopkins, Minn.
fDate :
10/1/1969 12:00:00 AM
Abstract :
A piezoresistive bridge and integrated circuit amplifier can be made in the same silicon cantilever. The purpose of the amplifier is to linearize as well as amplify the output.
Keywords :
Bridge circuits; Force sensors; Magnetic field induced strain; Magnetic sensors; Piezoresistance; Resistors; Sensor phenomena and characterization; Silicon; Stress; Temperature sensors;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1969.16871
