Title :
Minute batch-fabricated tuning forks for silicon integrated circuits
Author_Institution :
Westinghouse Research Laboratories, Pittsburgh, Pa
fDate :
9/1/1968 12:00:00 AM
Keywords :
IC (Integrated circuits); Integrated circuits; Resonators; Active filters; Circuit optimization; Coils; Costs; Frequency; Inductors; Oscillators; Silicon; Tuning; Vibrations;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.1968.1066257
