• DocumentCode
    1037497
  • Title

    Minute batch-fabricated tuning forks for silicon integrated circuits

  • Author

    Nathanson, H.

  • Author_Institution
    Westinghouse Research Laboratories, Pittsburgh, Pa
  • Volume
    4
  • Issue
    3
  • fYear
    1968
  • fDate
    9/1/1968 12:00:00 AM
  • Firstpage
    220
  • Lastpage
    221
  • Keywords
    IC (Integrated circuits); Integrated circuits; Resonators; Active filters; Circuit optimization; Coils; Costs; Frequency; Inductors; Oscillators; Silicon; Tuning; Vibrations;
  • fLanguage
    English
  • Journal_Title
    Magnetics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9464
  • Type

    jour

  • DOI
    10.1109/TMAG.1968.1066257
  • Filename
    1066257