Title :
Correction terms for contacts to diffused resistors
Author :
D´Andrea, G. ; Murrmann, H.
fDate :
6/1/1970 12:00:00 AM
Abstract :
Correction terms obtained from measurements on typical planar resistors are given and compared to values expected from two different mechanisms: inhomogeneous current flow around the contact or contact resistance between metal and diffusion layer. Good agreement between contact resistance model and experiment is shown.
Keywords :
Capacitance; Contact resistance; Diodes; Electric resistance; Electrical resistance measurement; Geometry; Oscillators; Radio frequency; Resistors; Thermal resistance;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1970.17016
