Title :
High-frequency acousto-optic deflector using ZnO thin films deposited on an amorphous substrate
Author :
Chang, Joana ; Harada, Nobohiro ; Kashiwa, S.
Author_Institution :
Furukawa Electric Co. Ltd., Yokohama R&D Laboratories, Yokohama, Japan
Abstract :
c-axis-oriented ZnO thin films were deposited on Corning 7059 glasses by RF magnetron sputtering. 230 MHz-bandwidth acousto-optic deflector was achieved by using this ZnO film. The propagation loss of the surface-acoustic wave in ZnO films was about 20dB/cm at the acoustic frequency of 630 MHz.
Keywords :
acousto-optical devices; integrated optics; losses; optical deflectors; sputtered coatings; surface acoustic waves; zinc compounds; 20 dB; 230 MHz; 630 MHz; ACOUSTO-OPTIC deflector; Corning 7059 glasses; RF magnetron sputtering; SAW; ZnO films; ZnO thin films; amorphous substrate; c-axis-oriented; film deposition; integrated optics; propagation loss; surface-acoustic wave;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19870955
