Optical deflection measurement for characterization of microelectromechanical systems (MEMS)

Author

Firebaugh, Samara L. ; Charles, Harry K., Jr. ; Edwards, Richard L. ; Keeney, Allen C. ; Wilderson, Samuel F.

Author_Institution

Electr. Eng. Dept., United States Naval Acad., Annapolis, MD, USA

Volume

53

Issue

4

fYear

2004

Firstpage

1047

Lastpage

1051

Abstract

Nonintrusive measurement of small out-of-plane motions of microscale structures is critical to the development of microelectromechanical systems (MEMS). This paper presents a low-cost deflection measurement system for MEMS structures based on a fiber optic displacement sensor. The system is demonstrated in the characterization of a microwave switch. The deflection system had a demonstrated sensitivity of 290±32 μV/nm over a deflection range of 100 μm. The calibration and linearity of the system are described, and the static and dynamic performance is compared to more elaborate systems.

Keywords

fibre optic sensors; microswitches; optical variables measurement; MEMS characterization; calibration; dynamic performance; fiber optic displacement sensor; microactuators; microelectromechanical systems; microscale structures; microsensors; microwave switch characterization; nondestructive testing; nonintrusive measurement; optical deflection measurement; optical fiber measurement applications; out-of-plane motions; sensitivity; static performance; system linearity; Calibration; Displacement measurement; Microelectromechanical systems; Micromechanical devices; Optical fiber sensors; Optical fibers; Optical sensors; Optical switches; Sensor phenomena and characterization; Sensor systems; Measurement; microactuators; microelectromechanical devices; microsensors; nondestructive testing; optical fiber measurement applications;

fLanguage

English

Journal_Title

Instrumentation and Measurement, IEEE Transactions on

Publisher

ieee

ISSN

0018-9456

Type

jour

DOI

10.1109/TIM.2004.831504

Filename

1315982