Title :
Displacement measurements using a self-mixing laser diode under moderate feedback
Author :
Bes, Caroline ; Plantier, Guy ; Bosch, Thierry
Author_Institution :
ENSEEIHT, Toulouse
Abstract :
A semiconductor laser subject to moderate optical feedback has been used to design an interferometric displacement sensor. The autoadaptative signal processing presented in this paper has been computed in order to improve the accuracy of such a sensor. This setup has been successfully tested for both harmonic and aleatory displacements of a remote piezoelectric actuator with a maximum accuracy of 40 nm
Keywords :
adaptive signal processing; displacement measurement; light interferometry; measurement by laser beam; optical sensors; piezoelectric actuators; semiconductor lasers; aleatory displacements; autoadaptative signal processing; displacement measurement; harmonic displacement; interferometric displacement sensor; moderate optical feedback; piezoelectric actuators; self-mixing laser diode; semiconductor laser; Diode lasers; Displacement measurement; Laser feedback; Laser modes; Optical design; Optical feedback; Optical interferometry; Optical sensors; Optical signal processing; Semiconductor lasers; Displacement measurement; optical feedback interferometry; optical sensor; semiconductor laser; signal processing;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
DOI :
10.1109/TIM.2006.876544
