A boundary technique for calculation of distributed resistance

A numerical technique is presented for calculating the resistance of two-terminal distributed resistors and the resistance matrix for multiterminal regions in integrated circuit layers. The technique, useful for computer-aided design of multiterminal resistors, makes use of Cauchy´s integral formula which facilitates coordination of conformal transformations at Singular boundary points. Results for a simple test structure (16 boundary points, 0.07 percent error in conductance calculation, 1.8 seconds computation time on a GE 635 computer) indicate this technique to be faster than various published techniques on computation time versus accuracy basis. The technique is applicable to structures with boundaries consisting of straight lines and circular arcs, multiply-connected, multiterminal, and open structures.