DocumentCode
104013
Title
Identifying Systematic Failures on Semiconductor Wafers Using ADCAS
Author
Ooi, Melanie Po-Leen ; Sok Hong Kuan ; Ye Chow Kuang ; Huiyuan Cheng ; Sim, Eric Kwang Joo ; Demidenko, Serge N. ; Chan, Chris Wei Keong
Volume
30
Issue
5
fYear
2013
fDate
Oct. 2013
Firstpage
44
Lastpage
53
Abstract
Product engineers are often called upon to use their unique mix of expertise and intuition to solve yield puzzles. Any tool that can help ease and automate the process is a welcome one. Industrial case studies demonstrate a new tool´s potential to provide automatically accurate, and potentially early, indications of underlying root cause for low-yielding wafers.
Keywords
electronic engineering computing; failure analysis; semiconductor technology; ADCAS; low-yielding wafers; product engineers; semiconductor wafers; systematic failures; Analysis of variance; Automatic test equipment; Classification algorithms; Clustering algorithms; Fabrication; Semiconductor wafers; Systematics;
fLanguage
English
Journal_Title
Design & Test, IEEE
Publisher
ieee
ISSN
2168-2356
Type
jour
DOI
10.1109/MDAT.2013.2253151
Filename
6484887
Link To Document