Title :
Identifying Systematic Failures on Semiconductor Wafers Using ADCAS
Author :
Ooi, Melanie Po-Leen ; Sok Hong Kuan ; Ye Chow Kuang ; Huiyuan Cheng ; Sim, Eric Kwang Joo ; Demidenko, Serge N. ; Chan, Chris Wei Keong
Abstract :
Product engineers are often called upon to use their unique mix of expertise and intuition to solve yield puzzles. Any tool that can help ease and automate the process is a welcome one. Industrial case studies demonstrate a new tool´s potential to provide automatically accurate, and potentially early, indications of underlying root cause for low-yielding wafers.
Keywords :
electronic engineering computing; failure analysis; semiconductor technology; ADCAS; low-yielding wafers; product engineers; semiconductor wafers; systematic failures; Analysis of variance; Automatic test equipment; Classification algorithms; Clustering algorithms; Fabrication; Semiconductor wafers; Systematics;
Journal_Title :
Design & Test, IEEE
DOI :
10.1109/MDAT.2013.2253151
