• DocumentCode
    1040684
  • Title

    The epi channel switch

  • Author

    Johnson, Brant T.

  • Author_Institution
    General Telephone and Electronics Laboratories, Waltham, Mass.
  • Volume
    18
  • Issue
    8
  • fYear
    1971
  • fDate
    8/1/1971 12:00:00 AM
  • Firstpage
    525
  • Lastpage
    527
  • Abstract
    The processing steps to build and the operation of a novel complementary device structure are discussed. The device achieves both a six times improvement in g_{m}/C_{g} figure of merit by a 2.5-to-1 reduction in channel length and a packing density on the order of 1 × 105gates/in2as a result of its vertical construction.
  • Keywords
    Conductivity; Control systems; Impedance; Impurities; Inverters; Logic circuits; Microscopy; Nanoscale devices; Switches; Temperature;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1971.17236
  • Filename
    1476558