Title :
Fine pitch TAB assembly technology for 820 pin count ceramic PGA using single point bonding technology at room temperature
Author :
Ando, Tetsuo ; Tomioka, Taizo ; Nakazono, Masakazu ; Atsumi, Koichiro ; Tane, Yasuo ; Nakano, Jiro ; Hirata, Seiichi
Author_Institution :
Manuf. Eng. Res. Center, Toshiba Corp., Yokohama, Japan
fDate :
12/1/1993 12:00:00 AM
Abstract :
A ceramic pin grid array (PGA) package for industrial computers has been developed by applying tape automated bonding (TAB) technology to one of the largest (20×20 mm) and highest pin count (820 pins) application-specific integrated circuits (ASICs) available in the semiconductor industry. To fabricate this package, a series of TAB assembly processes containing inner lead bonding (ILB), cutting and forming of TAB outer leads, solder sheet mounting, outer lead bonding (OLB), die attachment and lid sealing have been developed. To realize single-point TAB technology, the optimum design for a tape carrier and for electrode pad patterns on a ceramic substrate has been explored, a new bonding tool has been developed, and the optimum thickness of gold, plated on the electrode pads on the ceramic substrate, has been investigated. As a result of these investigations, outer lead bond strengths exceeding 30 gf and bonding accuracy within ±10 μm have been achieved. Degradation of bond strength by thermal cycle tests was not observed
Keywords :
application specific integrated circuits; ceramics; gold; integrated circuit technology; large scale integration; seals (stoppers); soldering; tape automated bonding; 20 mm; 820 pin count; ASIC; Au; ILB; OLB; application-specific integrated circuit; bonding tool; ceramic PGA; ceramic substrate; die attachment; electrode pad patterns; fine pitch TAB assembly technology; industrial computers; inner lead bonding; lid sealing; microassembly; outer lead bonding; pin grid array package; room temperature; single point bonding technology; solder sheet mounting; tape automated bonding; tape carrier; Assembly; Bonding; Ceramics; Electrodes; Electronics packaging; Integrated circuit packaging; Integrated circuit technology; Lead; Semiconductor device packaging; Substrates;
Journal_Title :
Components, Hybrids, and Manufacturing Technology, IEEE Transactions on