• DocumentCode
    1044522
  • Title

    Pocket implantation effect on drain current flicker noise in analog nMOSFET devices

  • Author

    Wu, Jun-Wei ; Cheng, Chih-Chang ; Chiu, Kai-Lin ; Guo, Jyh-Chyurn ; Lien, Wai-Yi ; Chang, Chih-Sheng ; Huang, Gou-Wei ; Wang, Tahui

  • Author_Institution
    Dept. of Electron. Eng., Nat. Chiao-Tung Univ., Hsinchu, Taiwan
  • Volume
    51
  • Issue
    8
  • fYear
    2004
  • Firstpage
    1262
  • Lastpage
    1266
  • Abstract
    The pocket implantation effect on drain current flicker noise in 0.13 μm CMOS process based high performance analog nMOSFETs is investigated. Our result shows that pocket implantation will significantly degrade device low-frequency noise primarily because of nonuniform threshold voltage distribution along the channel. An analytical flicker noise model to account for a pocket doping effect is proposed. In our model, the local threshold voltage and the width of the pocket implant region are extracted from the measured reverse short-channel effect, and the oxide trap density is extracted from a long-channel device. Good agreement between our model and the measurement result is obtained without other fitting parameters.
  • Keywords
    CMOS analogue integrated circuits; MOSFET; doping; flicker noise; ion implantation; semiconductor device models; 0.13 micron; CMOS process; analog nMOSFET devices; drain current flicker noise; fitting parameters; local threshold voltage; long-channel device; nonuniform threshold voltage distribution; oxide trap density; pocket doping effect; pocket implant region width; pocket implantation effect; reverse short-channel effect; 1f noise; Analytical models; CMOS process; Degradation; Doping; Low-frequency noise; MOSFET circuits; Semiconductor device modeling; Semiconductor process modeling; Threshold voltage; Flicker noise; modeling; nonuniform threshold voltage; pocket implant;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/TED.2004.831369
  • Filename
    1317147