Title :
Spiral Inductors Using Polymer-Core Conductors
Author :
Yook, Jong-Min ; Kwon, Young-Se
fDate :
7/1/2007 12:00:00 AM
Abstract :
We made thick spiral inductors using a polymer-core conductor. The proposed fabrication process to make the polymer-core conductor is very easy and cost effective compared with other radio frequency microelectromechanical systems processes. SU-8 photoresist was used as the core. The fabricated spiral inductors on a high resistivity silicon, 2500 Omega have a very high Q factor of more than 40 at 2 GHz.
Keywords :
conductors (electric); electroplated coatings; inductors; photoresists; SU-8 photoresist; frequency 2 GHz; polymer-core conductors; spiral inductors; Conductivity; Conductors; Costs; Fabrication; Inductors; Polymers; Radiofrequency microelectromechanical systems; Resists; Silicon; Spirals; High $Q$; SU-8; inductor; polymer-core conductor;
Journal_Title :
Microwave and Wireless Components Letters, IEEE
DOI :
10.1109/LMWC.2007.899305
