DocumentCode
1045426
Title
´High frequency´ quasiplanar GaInP/GaAs HBT with CBE selective collector contact regrowth
Author
Zerguine, D. ; Launay, P. ; Alexandre, F. ; Benchimol, J.L. ; Etrillard, J.
Author_Institution
CNET, Bagneux, France
Volume
29
Issue
15
fYear
1993
fDate
7/22/1993 12:00:00 AM
Firstpage
1349
Lastpage
1350
Abstract
Quasiplanar GaInP/GaAs heterojunction bipolar transistors (HBTs) with selective regrowth of the collector contact are reported. Such devices have a planar surface topology which should allow large scale integration. The multilayer HBT structure and the selective regrown collector contact are realised by chemical beam epitaxy (CBE). Cutoff frequency and maximum oscillation frequency of 30 and 25 GHz respectively, have been obtained for devices with 2*15 mu m2 emitter-base junction area.
Keywords
III-V semiconductors; chemical beam epitaxial growth; gallium arsenide; gallium compounds; heterojunction bipolar transistors; indium compounds; semiconductor growth; solid-state microwave devices; 25 GHz; 30 GHz; CBE selective collector contact regrowth; GaInP-GaAs; chemical beam epitaxy; heterojunction bipolar transistors; large scale integration; maximum oscillation frequency; multilayer HBT structure; planar surface topology; quasiplanar HBT;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19930904
Filename
274847
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