Analytical equations describing the high-frequency (1 MHz) capacitance-voltage (

) characteristics have been derived for diffused p-n junction diodes, including the effect of deep-level states within the bandgap. It was found that the C
-3versus

curve becomes nonlinear when the density of the deep-level states is large. From the derived

equation the density of the deep-level states may be calculated from the slope of the

versus

curve, where V
2is related to the energy level of the deep states. The value of V
2may be determined from the recombination current versus temperature measurements at small bias. The theory has been applied to characterize the dominant deep-level recombination centers in Zn-diffused GaAs light-emitting diodes. The measured deep levels are within 0.2 eV of the midgap energy and the density of these centers is of the order of 10
16cm
-3.