• DocumentCode
    1045735
  • Title

    Electrical measurement of resistivity fluctuations associated with striations in silicon crystals

  • Author

    Burtscher, J. ; Dorendorf, H.W. ; Krausse, J.

  • Author_Institution
    Siemens AG, Munich, Germany
  • Volume
    20
  • Issue
    8
  • fYear
    1973
  • fDate
    8/1/1973 12:00:00 AM
  • Firstpage
    702
  • Lastpage
    708
  • Abstract
    In order to investigate the resistivity fluctuations associated with striations in silicon crystals, the silicon surface was supplied with an arrangement of closely spaced (10 µm) nonblocking aluminum-silicon contacts. The resistivity was measured using a Wheatstone bridge technique. In addition, we used the aluminum-silicon contacts for spreading resistance measurements. Measurements with aluminum-silicon contacts can be repeated, e.g., to demonstrate reproducibility. This is in contrast to the methods using a sequence of direct contacts between the metal probe and the silicon surface.
  • Keywords
    Bridge circuits; Conductivity; Contacts; Crystals; Electric variables measurement; Electrical resistance measurement; Fluctuations; Reproducibility of results; Silicon; Surface resistance;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1973.17731
  • Filename
    1477388