DocumentCode
1045735
Title
Electrical measurement of resistivity fluctuations associated with striations in silicon crystals
Author
Burtscher, J. ; Dorendorf, H.W. ; Krausse, J.
Author_Institution
Siemens AG, Munich, Germany
Volume
20
Issue
8
fYear
1973
fDate
8/1/1973 12:00:00 AM
Firstpage
702
Lastpage
708
Abstract
In order to investigate the resistivity fluctuations associated with striations in silicon crystals, the silicon surface was supplied with an arrangement of closely spaced (10 µm) nonblocking aluminum-silicon contacts. The resistivity was measured using a Wheatstone bridge technique. In addition, we used the aluminum-silicon contacts for spreading resistance measurements. Measurements with aluminum-silicon contacts can be repeated, e.g., to demonstrate reproducibility. This is in contrast to the methods using a sequence of direct contacts between the metal probe and the silicon surface.
Keywords
Bridge circuits; Conductivity; Contacts; Crystals; Electric variables measurement; Electrical resistance measurement; Fluctuations; Reproducibility of results; Silicon; Surface resistance;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1973.17731
Filename
1477388
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