DocumentCode
1046403
Title
A new method of depositing garnet films
Author
Braginski, Aleksander I.
Author_Institution
Westinghouse Research Laboratories, Pittsburgh, Pa.
Volume
7
Issue
3
fYear
1971
fDate
9/1/1971 12:00:00 AM
Firstpage
467
Lastpage
470
Abstract
Yttrium iron garnet films were deposited by chemical transport using a solid Fe2 O3 source and an additional YCl3 vapor delivery. Layers deposited on GdGaG were epitaxial. At the low deposition rates employed, substitution of substrate by film components was observed. The deposition method was applicable also to rare-earth garnets; GdIg and DyIG were prepared.
Keywords
Epitaxial growth; Magnetic bubble materials; YIG; YIG films; Chemical vapor deposition; Garnet films; Inductors; Iron; Microwave devices; Solids; Substrates; Temperature; Thermodynamics; Yttrium;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/TMAG.1971.1067079
Filename
1067079
Link To Document