DocumentCode

1046691

Title

Molecular beam epitaxy of GaAs voltage variable capacitors

Author

Cho, Andrew Y. ; Reinhart, F.K.

Volume

20

Issue

12

fYear

1973

fDate

12/1/1973 12:00:00 AM

Firstpage

1173

Lastpage

1173

Keywords

Capacitors; Etching; Gallium arsenide; Inhibitors; Molecular beam epitaxial growth; Nonlinear optics; Optical films; Optical sensors; Resists; Voltage;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1973.17824

Filename

1477481