DocumentCode

1046713

Title

Machining integrated optical structures in photoresist

Author

Dill, F.H. ; Neureuther, A.R.

Volume

20

Issue

12

fYear

1973

fDate

12/1/1973 12:00:00 AM

Firstpage

1173

Lastpage

1173

Keywords

Absorption; Etching; Inhibitors; Integrated optics; Machining; Nonlinear optics; Optical films; Optical sensors; Optical waveguides; Resists;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1973.17826

Filename

1477483