Title :
Liquid-crystal technique for observing integrated-circuit operation
Author_Institution :
RCA Laboratories, Princeton, N. J.
fDate :
10/1/1974 12:00:00 AM
Abstract :
A nondestructive technique has been developed that enables both the electric fields and temperature distributions at the surface of an operating integrated circuit to be viewed with conventional optical microscopes. Packaged chips or unscribed wafers are coated with a nematic liquid-crystal layer and operated in their normal fashion. Practical preparation and observation procedures have been developed.
Keywords :
Birefringence; Circuits; Conducting materials; Crystalline materials; Liquid crystals; Neodymium; Optical materials; Optical refraction; Optical scattering; Semiconductor materials;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1974.17985
