• DocumentCode
    1048346
  • Title

    Ultraviolet Assisted 3-D Microstructures on PET

  • Author

    Komijani, Y. ; Izadi, N. ; Khadem-Hosseinieh, B. ; Mohajerzadeh, S.

  • Author_Institution
    Dept. of Electr. Eng & Comput. Eng., Tehran Univ.
  • Volume
    6
  • Issue
    4
  • fYear
    2006
  • Firstpage
    851
  • Lastpage
    853
  • Abstract
    UV-assisted deep vertical etching of polyethylene terephthalate (PET) is shown to be suitable for realizing high resolution and high-aspect-ratio features, and is applied to fabrication of microelectromechanical systems (MEMS) and photonics devices. The technique has the potential to be used for structures below micrometer regime
  • Keywords
    etching; micromachining; micromechanical devices; organic compounds; photonic crystals; polymers; 3D microstructures; MEMS; PET; deep vertical etching; high-aspect-ratio structures; microelectromechanical systems; micromachining; photonics devices; polyethylene terephthalate; ultraviolet assisted microstructures; Anisotropic magnetoresistance; Containers; Etching; Fabrication; Microstructure; Photonic crystals; Plastics; Polyethylene; Positron emission tomography; Temperature; High-aspect-ratio structures; micromachining; polyethylene terephthalate (PET); vertical etching;
  • fLanguage
    English
  • Journal_Title
    Sensors Journal, IEEE
  • Publisher
    ieee
  • ISSN
    1530-437X
  • Type

    jour

  • DOI
    10.1109/JSEN.2006.877845
  • Filename
    1661562
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1048346