DocumentCode :
1048715
Title :
Leakage behavior of DC electrically degraded (Ba,Sr)TiO3 thin films
Author :
Hara, Toru
Author_Institution :
Taiyo Yuden Co. Ltd., Gunma, Japan
Volume :
4
Issue :
2
fYear :
2004
fDate :
6/1/2004 12:00:00 AM
Firstpage :
268
Lastpage :
272
Abstract :
The phenomena of dc electrical degradation of (Ba0.5Sr0.5)TiO3 thin films was studied. From our experimental and analytical results of current versus voltage (I-V) characteristics, it was shown that the degraded devices exhibited analogous leakage behaviors with the devices which have thin intercalated (Ba0.5Sr0.5)TiO3 layers with intentionally introduced oxygen vacancies between cathodes and thick (Ba0.5Sr0.5)TiO3 layers without intentionally introduced oxygen vacancies. This could be explained by assuming that oxygen vacancies accumulate at the interfaces between the cathodes and the (Ba0.5Sr0.5)TiO3 films after fatigue.
Keywords :
barium compounds; cathodes; fatigue; leakage currents; oxygen; strontium compounds; thin films; (BaSr)TiO3; cathodes; current versus voltage characteristics; dc electrical degradation; degraded devices; fatigue; interface; leakage behavior; oxygen vacancies; thin films; Capacitors; Cathodes; Degradation; Dielectric thin films; Fatigue; Sputtering; Strontium; Testing; Transistors; Voltage; $; $; degradation; hboxBa,hboxSr; hboxTiO_; interface; oxygen vacancy; thin film;
fLanguage :
English
Journal_Title :
Device and Materials Reliability, IEEE Transactions on
Publisher :
ieee
ISSN :
1530-4388
Type :
jour
DOI :
10.1109/TDMR.2004.827270
Filename :
1318632
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1048715
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