DocumentCode
1048841
Title
V-3 doping profile measurement from avalanche space-charge resistance: A new technique
Author
Glover, Gary H. ; Tantraporn, W.
Volume
21
Issue
11
fYear
1974
fDate
11/1/1974 12:00:00 AM
Firstpage
743
Lastpage
743
Keywords
Doping profiles; Electric breakdown; Electric resistance; Electrical resistance measurement; Fluctuations; Frequency; Liquid crystals; Schottky diodes; Semiconductor diodes; Semiconductor process modeling;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1974.18036
Filename
1477851
Link To Document