Title :
V-1 laser fabrication of large-area arrays: Thin-film silicon isolated devices on fused Silica substrates
Author :
Laff, R.A. ; Hutchins, G.L.
fDate :
11/1/1974 12:00:00 AM
Keywords :
Heating; Laser beams; Optical arrays; Optical device fabrication; Semiconductor laser arrays; Semiconductor thin films; Silicon compounds; Substrates; Thin film devices; X-ray lithography;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1974.18037
