Title :
V-2 generation of high-resolution large-area patterns by X-ray lithography
Author :
Maydan, D. ; Coquin, G.A. ; Maldonado, J.R. ; Taylor, G.N.
fDate :
11/1/1974 12:00:00 AM
Keywords :
Doping profiles; Electric resistance; Electrical resistance measurement; Liquid crystals; Resists; Schottky diodes; Semiconductor diodes; Semiconductor process modeling; Silicon; X-ray lithography;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1974.18038
