Title :
Low loss single-mode optical waveguides with large cross-section in standard epitaxial silicon
Author :
Splett, A. ; Petermann, K.
Author_Institution :
Inst. fur Hochfrequenztech., Tech. Univ. Berlin, Germany
fDate :
3/1/1994 12:00:00 AM
Abstract :
Single-mode waveguides, well matched to the fiber spot size, have been fabricated by chemical etching of standard epitaxial silicon. Analytical estimations for the waveguide attenuation are given. Measured waveguide losses below 1.5 dB/cm have been obtained at both wavelengths, /spl lambda/=1.3 μm and /spl lambda/=1.55 μm.
Keywords :
elemental semiconductors; integrated optics; optical losses; optical waveguides; silicon; 1.3 mum; 1.55 mum; Si; Si layer waveguiding; chemical etching; fiber spot size; integrated optics; large cross-section; low loss single-mode optical waveguides; standard epitaxial silicon; waveguide attenuation; waveguide losses; Attenuation; Doping; Optical losses; Optical refraction; Optical variables control; Optical waveguides; Propagation losses; Silicon; Slabs; Substrates;
Journal_Title :
Photonics Technology Letters, IEEE
