DocumentCode
1049805
Title
Deep-channel MOS transistor
Author
Berger, Josef
Author_Institution
Hewlett Packard Laboratories, Palo Alto, Calif.
Volume
22
Issue
6
fYear
1975
fDate
6/1/1975 12:00:00 AM
Firstpage
314
Lastpage
319
Abstract
A new type of ion-implanted MOS transistor is described. The transistor functions, for example, as an integrating nondestructively readable photosensor and its technology is fully compatible with the advanced MOS integrated circuits.
Keywords
Boron; Charge coupled devices; Doping profiles; Implants; Integrated circuit technology; MOS integrated circuits; MOSFETs; Semiconductor device doping; Substrates; Transistors;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1975.18129
Filename
1477964
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