Title :
Novel stationary-sample atomic force microscope with beam-tracking lens
Author :
Jung, P.S. ; Yaniv, D.R.
Author_Institution :
AT Corp., Mesa, AZ, USA
Abstract :
An atomic force microscope with a stationary sample and a scanning cantilever using an optical lever method is demonstrated for the first time. The cantilever tip is translated to measure surface profiles while a simple lens attached to the cantilever holder guides a focused beam from a fixed collimated diode laser. The imaging capability is demonstrated up to 100*100 mu m2.
Keywords :
atomic force microscopy; measurement by laser beam; 100 micron; atomic force microscope; beam-tracking lens; cantilever tip; fixed collimated diode laser; focused beam guidance; imaging capability; optical lever method; scanning cantilever; stationary sample;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19930181