DocumentCode :
1050933
Title :
Novel stationary-sample atomic force microscope with beam-tracking lens
Author :
Jung, P.S. ; Yaniv, D.R.
Author_Institution :
AT Corp., Mesa, AZ, USA
Volume :
29
Issue :
3
fYear :
1993
Firstpage :
264
Lastpage :
266
Abstract :
An atomic force microscope with a stationary sample and a scanning cantilever using an optical lever method is demonstrated for the first time. The cantilever tip is translated to measure surface profiles while a simple lens attached to the cantilever holder guides a focused beam from a fixed collimated diode laser. The imaging capability is demonstrated up to 100*100 mu m2.
Keywords :
atomic force microscopy; measurement by laser beam; 100 micron; atomic force microscope; beam-tracking lens; cantilever tip; fixed collimated diode laser; focused beam guidance; imaging capability; optical lever method; scanning cantilever; stationary sample;
fLanguage :
English
Journal_Title :
Electronics Letters
Publisher :
iet
ISSN :
0013-5194
Type :
jour
DOI :
10.1049/el:19930181
Filename :
277161
Link To Document :
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