• DocumentCode
    1050933
  • Title

    Novel stationary-sample atomic force microscope with beam-tracking lens

  • Author

    Jung, P.S. ; Yaniv, D.R.

  • Author_Institution
    AT Corp., Mesa, AZ, USA
  • Volume
    29
  • Issue
    3
  • fYear
    1993
  • Firstpage
    264
  • Lastpage
    266
  • Abstract
    An atomic force microscope with a stationary sample and a scanning cantilever using an optical lever method is demonstrated for the first time. The cantilever tip is translated to measure surface profiles while a simple lens attached to the cantilever holder guides a focused beam from a fixed collimated diode laser. The imaging capability is demonstrated up to 100*100 mu m2.
  • Keywords
    atomic force microscopy; measurement by laser beam; 100 micron; atomic force microscope; beam-tracking lens; cantilever tip; fixed collimated diode laser; focused beam guidance; imaging capability; optical lever method; scanning cantilever; stationary sample;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19930181
  • Filename
    277161
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1050933