• DocumentCode
    1051124
  • Title

    Test cells for evaluation of low currents and capacitances CMOS devices

  • Author

    Nouet, Pascal ; Girard, P.

  • Volume
    29
  • Issue
    3
  • fYear
    1993
  • Firstpage
    290
  • Lastpage
    291
  • Abstract
    A method allowing the determination of currents and capacitances in the fA and fF range, respectively, is presented. It consists of a test cell associated with a standard measurement equipment. The principle is described and experimental results illustrate some possibilities of this method.
  • Keywords
    capacitance measurement; electric current measurement; insulated gate field effect transistors; semiconductor device testing; CMOS devices; capacitances; currents; standard measurement equipment; test cell;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19930198
  • Filename
    277178
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1051124