DocumentCode
1051262
Title
A modified linear sweep technique for MOS-C generation rate measurements
Author
Pierret, R.F. ; Small, D.W.
Author_Institution
Purdue University, West Lafayette, Ind.
Volume
22
Issue
11
fYear
1975
fDate
11/1/1975 12:00:00 AM
Firstpage
1051
Lastpage
1052
Abstract
A modified linear sweep technique is described which allows one to rapidly determine the carrier generation rate versus semiconductor depletion width dependence exhibited by deeply depleted MOS-C structures. Although requiring more sophisticated instrumentation, the modified procedure is more flexible, more accurate, and less time-consuming than the original technique.
Keywords
Capacitance; Circuit theory; Instruments; Insulation; Niobium; Notice of Violation; Performance evaluation; Silicon; Solid state circuits; Temperature dependence;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1975.18270
Filename
1478105
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