• DocumentCode
    1051581
  • Title

    The dispersion and matching characteristics of the helical resonator plasma source

  • Author

    Niazi, Kaveh ; Lichtenberg, Allan J. ; Lieberman, Michael A.

  • Author_Institution
    Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA
  • Volume
    23
  • Issue
    5
  • fYear
    1995
  • fDate
    10/1/1995 12:00:00 AM
  • Firstpage
    833
  • Lastpage
    843
  • Abstract
    The dispersion characteristics and the fields of a helical resonator are obtained. The coil is approximated by a helical current layer with infinite conductivity along the current direction (a “sheath helix”). The plasma column is modeled as a cylindrical dielectric in which the dielectric losses can be neglected in determining the propagation properties of the resonator. Assuming the plasma losses are known, the model can be used to study the matching of the helical resonator to an external power source which is connected to the helix by a tap. The resonator is modeled as a parallel connection of two transmission line segments on each side of the tap position. We determine the efficiency of power transfer to the resonator as a function of the tap position driving frequency, and plasma loading. We find that whereas for a small plasma loading it is possible to achieve perfect matching, there exists a critical value of plasma loading beyond which a perfect match is no longer possible
  • Keywords
    dielectric losses; plasma production; plasma sheaths; cylindrical dielectric; dielectric losses; dispersion characteristics; external power source; helical current layer; helical resonator plasma source; infinite conductivity; matching characteristics; plasma column; plasma losses; power transfer; propagation properties; sheath helix; transmission line segments; Conductors; Dielectric losses; Frequency; Plasma applications; Plasma confinement; Plasma density; Plasma devices; Plasma properties; Plasma sources; Plasma waves;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/27.473202
  • Filename
    473202