• DocumentCode
    1051759
  • Title

    VI-2 the influence of diffused metallic impurities of the MOS capacitor structure

  • Author

    Goodman, F.R. ; Neville, R.C.

  • Author_Institution
    University of California, Santa Barbara, Calif.
  • Volume
    22
  • Issue
    11
  • fYear
    1975
  • Firstpage
    1067
  • Lastpage
    1067
  • Abstract
    Summary form only. An abstract of the above-titled article taken from the Device Research Conference (24-26 June 1975, Carleton University, Ottawa, Ont., Canada) is presented.
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1975.18320
  • Filename
    1478155