DocumentCode
1051759
Title
VI-2 the influence of diffused metallic impurities of the MOS capacitor structure
Author
Goodman, F.R. ; Neville, R.C.
Author_Institution
University of California, Santa Barbara, Calif.
Volume
22
Issue
11
fYear
1975
Firstpage
1067
Lastpage
1067
Abstract
Summary form only. An abstract of the above-titled article taken from the Device Research Conference (24-26 June 1975, Carleton University, Ottawa, Ont., Canada) is presented.
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1975.18320
Filename
1478155
Link To Document