DocumentCode :
1051759
Title :
VI-2 the influence of diffused metallic impurities of the MOS capacitor structure
Author :
Goodman, F.R. ; Neville, R.C.
Author_Institution :
University of California, Santa Barbara, Calif.
Volume :
22
Issue :
11
fYear :
1975
Firstpage :
1067
Lastpage :
1067
Abstract :
Summary form only. An abstract of the above-titled article taken from the Device Research Conference (24-26 June 1975, Carleton University, Ottawa, Ont., Canada) is presented.
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1975.18320
Filename :
1478155
Link To Document :
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