Title :
A silicon integrated strain-gage transducer with high linearity
Author_Institution :
Technik und Biologie der Fraunhofer--Gesellschaft, Karlsruhe, Germany
fDate :
1/1/1976 12:00:00 AM
Abstract :
The disadvantages of semiconductor strain-gage transducers are nonlinearity and temperature sensitivity. Using a monolithic integrated circuit Wheatstone bridge on a silicon cantilever enables linearization by variation of the location or width of the sensing devices. Excellent temperature stability is achieved by the integration itself and an additional external resistor.
Keywords :
Bridge circuits; Capacitive sensors; Circuit stability; Conductivity; Linearity; Piezoresistance; Resistors; Silicon; Temperature sensors; Transducers;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1976.18348
