Effect of transverse force on the performance of quartz resonator force sensors

Author

Wang, Zheyao ; Dong, Yonggui ; Zhu, Huizhong ; Feng, Guanping

Author_Institution

Inst. of Microelectron., Tsinghua Univ., Beijing, China

Volume

51

Issue

4

fYear

2004

fDate

4/1/2004 12:00:00 AM

Firstpage

470

Lastpage

476

Abstract

This paper discusses the effect of transverse force on the performance of quartz crystal resonator (QXR) force sensors that use symmetrical incomplete circular QXRs as sensing elements. Based on Lee´s vibration theory and the transverse force-induced stress distribution, frequency changes are derived. This result and finite element method (FEM) are applied to investigate the performance of two metal-quartz combined sensors under the action of transverse force. Analytical and experimental results show that transverse force affects the sensitivity and linearity of QXR force sensors.

Keywords

crystal resonators; finite element analysis; force measurement; force sensors; stress effects; FEM; Lee´s vibration theory; Lees vibration theory; QXR force sensors; finite element method; linearity; metal quartz combined sensors; quartz crystal resonator force sensors; sensitivity; symmetrical incomplete circular quartz crystal resonator; transverse force induced stress distribution; Acceleration; Electrodes; Finite element methods; Force measurement; Force sensors; Frequency control; Linearity; Stability; Stress; Temperature sensors;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/TUFFC.2004.1295433

Filename

1320812