Title :
A direct energy balance method for approximating envelope decay of oscillating MEMS structures
Author_Institution :
Aspen Sci. Design Inc., Nashua, NH, USA
fDate :
6/1/2004 12:00:00 AM
Abstract :
The real pole component (envelope decay coefficient) of all oscillating microelectromechanical systems (MEMS) structure is calculated directly in the energy domain without using an equation of motion. Similar to the simplified Rayleigh frequency calculation in which maximum potential and kinetic energy are equated, our method equates the initial minus dissipated energy to present energy.
Keywords :
micromechanical devices; Rayleigh frequency calculation; energy balance method; energy domain; envelope decay coefficient; equation of motion; kinetic energy; microelectromechanical systems; oscillating MEMS structures; potential energy; Damping; Equations; Integrated circuit modeling; Kinetic energy; Microelectromechanical systems; Micromechanical devices; Potential energy; Resonance; Resonant frequency; Transfer functions;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
DOI :
10.1109/TUFFC.2004.1304275
