DocumentCode
1053302
Title
A direct energy balance method for approximating envelope decay of oscillating MEMS structures
Author
Lish, C. Andrew
Author_Institution
Aspen Sci. Design Inc., Nashua, NH, USA
Volume
51
Issue
6
fYear
2004
fDate
6/1/2004 12:00:00 AM
Firstpage
765
Lastpage
767
Abstract
The real pole component (envelope decay coefficient) of all oscillating microelectromechanical systems (MEMS) structure is calculated directly in the energy domain without using an equation of motion. Similar to the simplified Rayleigh frequency calculation in which maximum potential and kinetic energy are equated, our method equates the initial minus dissipated energy to present energy.
Keywords
micromechanical devices; Rayleigh frequency calculation; energy balance method; energy domain; envelope decay coefficient; equation of motion; kinetic energy; microelectromechanical systems; oscillating MEMS structures; potential energy; Damping; Equations; Integrated circuit modeling; Kinetic energy; Microelectromechanical systems; Micromechanical devices; Potential energy; Resonance; Resonant frequency; Transfer functions;
fLanguage
English
Journal_Title
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
Publisher
ieee
ISSN
0885-3010
Type
jour
DOI
10.1109/TUFFC.2004.1304275
Filename
1320857
Link To Document