• DocumentCode
    1053515
  • Title

    Preparation and application of neutron transmutation doped silicon for power device research

  • Author

    Hill, Martin J. ; Van Iseghem, Paul M. ; Zimmermann, Wolfgang

  • Author_Institution
    Brown Boveri Research Centre, Baden, Switzerland
  • Volume
    23
  • Issue
    8
  • fYear
    1976
  • fDate
    8/1/1976 12:00:00 AM
  • Firstpage
    809
  • Lastpage
    813
  • Abstract
    Very uniform phosphorus-doped high resistivity silicon suitable for power device research and production can be prepared using the thermal neutron activation of Si30to produce P31[1], [2], [4]. Some aspects of this process are described here, and it is shown that the method is also suitable for rapid production of silicon with precise resistivity tolerances in relatively small quantities for R and D purposes. Some of the considerable advantages to be gained by using this material for research purposes are described. Detailed studies of blocking characteristics and of the relationship between Au concentration, carrier lifetime, and resistivity using spreading resistance are shown to be possible, whereas using standard floating zone silicon, the resistivity fluctuations present are too large to allow this.
  • Keywords
    Charge carrier lifetime; Conductivity; Fluctuations; Gold; Neutrons; Production; Rapid thermal processing; Research and development; Silicon; Thermal resistance;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1976.18490
  • Filename
    1478503