DocumentCode
1054285
Title
Surface tension driven formation of microstructures
Author
Bauer, Joseph M. ; Saif, T.A. ; Beebe, David J.
Author_Institution
Theor. & Appl. Mech. Dept., Univ. of Illinois, Urbana, IL, USA
Volume
13
Issue
4
fYear
2004
Firstpage
553
Lastpage
558
Abstract
The controlled formation of curved, three-dimensional (3-D) microstructures can be accomplished through solidification from a liquid phase. As a demonstration, we have placed objects in contact with the interface of a photopolymerizable liquid and air to create various liquid menisci that were subsequently solidified with ultraviolet radiation. Geometric control is achieved through variation of physical and environmental parameters; for example, solidified menisci formed at 25°C were 300 μm taller than those formed at 7°C. Comparisons between the polymerized structures and theoretical predictions for liquid menisci indicate that the polymerization process results in repeatable changes in contact angle and meniscus size.
Keywords
micromechanical devices; polymerisation; solidification; surface tension; 25 C; 300 micron; 3D microstructures; 7 C; contact angle; controlled formation; environmental parameters; geometric control; liquid menisci; liquid phase; meniscus size; microassembly; microelectromechanical devices; microstructures formation; photopolymerizable liquid; physical parameters; polymerization process; polymerized structures; solidification; solidified menisci; surface tension; ultraviolet radiation; Biomedical engineering; Chemicals; Etching; Geometry; Micromechanical devices; Microstructure; Polymers; Shape control; Solids; Surface tension; Microassembly; microelectronechanical devices; polymerization; surface tension;
fLanguage
English
Journal_Title
Microelectromechanical Systems, Journal of
Publisher
ieee
ISSN
1057-7157
Type
jour
DOI
10.1109/JMEMS.2004.832181
Filename
1321091
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