DocumentCode :
1054285
Title :
Surface tension driven formation of microstructures
Author :
Bauer, Joseph M. ; Saif, T.A. ; Beebe, David J.
Author_Institution :
Theor. & Appl. Mech. Dept., Univ. of Illinois, Urbana, IL, USA
Volume :
13
Issue :
4
fYear :
2004
Firstpage :
553
Lastpage :
558
Abstract :
The controlled formation of curved, three-dimensional (3-D) microstructures can be accomplished through solidification from a liquid phase. As a demonstration, we have placed objects in contact with the interface of a photopolymerizable liquid and air to create various liquid menisci that were subsequently solidified with ultraviolet radiation. Geometric control is achieved through variation of physical and environmental parameters; for example, solidified menisci formed at 25°C were 300 μm taller than those formed at 7°C. Comparisons between the polymerized structures and theoretical predictions for liquid menisci indicate that the polymerization process results in repeatable changes in contact angle and meniscus size.
Keywords :
micromechanical devices; polymerisation; solidification; surface tension; 25 C; 300 micron; 3D microstructures; 7 C; contact angle; controlled formation; environmental parameters; geometric control; liquid menisci; liquid phase; meniscus size; microassembly; microelectromechanical devices; microstructures formation; photopolymerizable liquid; physical parameters; polymerization process; polymerized structures; solidification; solidified menisci; surface tension; ultraviolet radiation; Biomedical engineering; Chemicals; Etching; Geometry; Micromechanical devices; Microstructure; Polymers; Shape control; Solids; Surface tension; Microassembly; microelectronechanical devices; polymerization; surface tension;
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2004.832181
Filename :
1321091
Link To Document :
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