• DocumentCode
    1054285
  • Title

    Surface tension driven formation of microstructures

  • Author

    Bauer, Joseph M. ; Saif, T.A. ; Beebe, David J.

  • Author_Institution
    Theor. & Appl. Mech. Dept., Univ. of Illinois, Urbana, IL, USA
  • Volume
    13
  • Issue
    4
  • fYear
    2004
  • Firstpage
    553
  • Lastpage
    558
  • Abstract
    The controlled formation of curved, three-dimensional (3-D) microstructures can be accomplished through solidification from a liquid phase. As a demonstration, we have placed objects in contact with the interface of a photopolymerizable liquid and air to create various liquid menisci that were subsequently solidified with ultraviolet radiation. Geometric control is achieved through variation of physical and environmental parameters; for example, solidified menisci formed at 25°C were 300 μm taller than those formed at 7°C. Comparisons between the polymerized structures and theoretical predictions for liquid menisci indicate that the polymerization process results in repeatable changes in contact angle and meniscus size.
  • Keywords
    micromechanical devices; polymerisation; solidification; surface tension; 25 C; 300 micron; 3D microstructures; 7 C; contact angle; controlled formation; environmental parameters; geometric control; liquid menisci; liquid phase; meniscus size; microassembly; microelectromechanical devices; microstructures formation; photopolymerizable liquid; physical parameters; polymerization process; polymerized structures; solidification; solidified menisci; surface tension; ultraviolet radiation; Biomedical engineering; Chemicals; Etching; Geometry; Micromechanical devices; Microstructure; Polymers; Shape control; Solids; Surface tension; Microassembly; microelectronechanical devices; polymerization; surface tension;
  • fLanguage
    English
  • Journal_Title
    Microelectromechanical Systems, Journal of
  • Publisher
    ieee
  • ISSN
    1057-7157
  • Type

    jour

  • DOI
    10.1109/JMEMS.2004.832181
  • Filename
    1321091