Title :
A method for precision patterning of silicone elastomer and its applications
Author :
Ryu, Kee Suk ; Wang, Xuefeng ; Shaikh, Kashan ; Liu, Chang
Author_Institution :
Sensors & Syst. Group, Univ. of Illinois, Urbana, IL, USA
Abstract :
This paper presents a general microfabrication method for precision patterning of thin-film poly(dimethylsiloxane) (PDMS). The method enables PDMS microstructures with controlled lateral dimensions and thickness on a silicon or glass substrate. Two applications based on this new method are discussed. First, a scanning probe microscopy (SPM) probe with PDMS tip is developed and used for scanning probe contact printing (SPCP). Second, this paper demonstrates surface micromachined membranes with integrated silicone gaskets.
Keywords :
elastomers; micromachining; scanning probe microscopy; silicon; substrates; thin films; glass substrate; integrated silicone gaskets; lateral dimensions; microfabrication method; microstructures; precision patterning; scanning probe contact printing; scanning probe microscopy probe; silicon; silicone elastomer; surface micro-machined membranes; thin-film poly(dimethyl-siloxane); Biomembranes; Gaskets; Glass; Microstructure; Printing; Scanning probe microscopy; Silicon; Substrates; Thickness control; Transistors; PDMS; Poly; SPCP; SPM; dimethylsiloxane; probes; scanning probe contact printing; scanning probe microscopy;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2004.832188
