An improved Reynolds-equation model for gas damping of microbeam motion

Author

Gallis, Michael A. ; Torczynski, John R.

Author_Institution

Eng. Sci. Center, Sandia Nat. Labs., Albuquerque, NM, USA

Volume

13

Issue

4

fYear

2004

Firstpage

653

Lastpage

659

Abstract

An improved gas-damping model for the out-of-plane motion of a near-substrate microbeam is developed based on the Reynolds equation (RE). A boundary condition for the RE is developed that relates the pressure at the beam edge to the beam motion. The coefficients in this boundary condition are determined from Navier-Stokes slip-jump (NSSJ) simulations for small slip lengths (relative to the gap height) and from direct simulation Monte Carlo (DSMC) molecular gas dynamics simulations for larger slip lengths. This boundary condition significantly improves the accuracy of the RE when the microbeam width is only slightly greater than the gap height between the microbeam and the substrate. The improved RE model is applied to microbeams fabricated using the SUMMiT V process.

Keywords

Monte Carlo methods; Navier-Stokes equations; fluid mechanics; particle beams; Navier-Stokes slip-jump simulations; Reynolds-equation model; SUMMiT V process; beam edge; beam motion; boundary condition; direct simulation Monte Carlo; gap height; gas-damping model; microbeam motion; molecular gas dynamics simulations; slip lengths; Boundary conditions; Damping; Equations; Fluid flow; Microstructure; Monte Carlo methods; National security; Power engineering and energy; Solid modeling; Surface treatment; DSMC; Direct simulation Monte Carlo; Navier–Stokes; RE; Reynolds equation; SUMMiT V; gas damping; microbeam; modeling;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2004.832194

Filename

1321103