Biofilter technology: an innovative and cost-effective system to remove VOC

Author

Jantschak, Andreas ; Daniels, Marc ; Paschold, Rainer

Author_Institution

Philips Semicond. GmbH, Hamburg, Germany

Volume

17

Issue

3

fYear

2004

Firstpage

255

Lastpage

260

Abstract

Biofilter technology is a cost-effective technique with an excellent efficiency for volatile organic compound (VOC) treatment. It is an attractive alternative to conventional air pollution abatement technologies. In this project, a combination of a Biosrubber and a Biofilter (called Biofilter System) was tested with VOC-laden exhaust air from a semiconductor fab. This Biofilter System meets all requirements of German and European law and protects the environment. The results of this project demonstrate that it is possible to establish this innovative and emerging technology in the semiconductor industry.

Keywords

air pollution; biological techniques; biosensors; electronics industry; organic compounds; biofilter technology; biosrubber system; conventional air pollution abatement technology; cost-effective system; laden exhaust air; semiconductor fabrication; semiconductor industry; volatile organic compound treatment; Biodegradation; Bioreactors; Carbon dioxide; Electronics industry; Inductors; Law; Legal factors; Microorganisms; Organic compounds; Oxidation; Air pollution; emission; organic compounds; semiconductor electronics industry;

fLanguage

English

Journal_Title

Semiconductor Manufacturing, IEEE Transactions on

Publisher

ieee

ISSN

0894-6507

Type

jour

DOI

10.1109/TSM.2004.831936

Filename

1321119