Title :
IIB-6 digital functions utilizing charge coupled devices
Author :
Allen, R.A. ; Anderson, J.M.
fDate :
11/1/1976 12:00:00 AM
Keywords :
Charge coupled devices; Charge-coupled image sensors; Circuits; Electron beams; Etching; Fabrication; Large-scale systems; Logic; Packaging; X-ray lithography;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1976.18606
