DocumentCode

1054697

Title

IIIA-1 pathways to finer device dimensions (invited tutorial)

Author

Iwersen, J.E.

Volume

23

Issue

11

fYear

1976

fDate

11/1/1976 12:00:00 AM

Firstpage

1253

Lastpage

1253

Keywords

Electron beams; Etching; Instruments; Large scale integration; Optical device fabrication; Polymers; Resists; Tutorial; Writing; X-ray lithography;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1976.18607

Filename

1478620