DocumentCode :
1054706
Title :
IIIA-3 LSI and magnetic bubbles device fabrication by X-ray lithography
Author :
Maydan, D. ; Coquin, G.A. ; Maldonado, J.R. ; Somekh, S. ; Taylor, G.N.
Volume :
23
Issue :
11
fYear :
1976
fDate :
11/1/1976 12:00:00 AM
Firstpage :
1253
Lastpage :
1253
Keywords :
Bonding; Electromagnetic wave absorption; Gold; Large scale integration; Magnetic devices; Optical device fabrication; Plastics; Polymers; Resists; X-ray lithography;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1976.18608
Filename :
1478621
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1054706
