Deposition of platinum nanoparticles on p-type macroporous silicon wall

A novel thermochemical technique of depositing platinum nanoparticles (PtNPs) on a porous silicon (PS) substrate is demonstrated. Self-arranged macroporous structures, appearing as microtest tubes, are first formed on p-type, boron doped, 100 orientation silicon wafers, by the electrochemical etching method in hydrofluoric acid and N, N-dimethyl formamide solution. The macroPS substrate is then coated with PtNPs by a novel thermochemical procedure. It was observed that PtNPs deposited on the pore walls are able to arrive even at the bottom of the pores without blocking their openings. Such PtNPs-coated macroPS chips have potential biomedical applications as silicon and platinum are biocompatible.